- Country: Sweden
- Summary: Automated Resist Processing System
- SET Ref No: 73101272
- Deadline: 11 Nov 2022
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: 562673-2022
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- Description:
- Scope Lund Nano Lab is planning to purchase an automated wafer processing cluster tool for spin coating and development. This system must contain process automation and be capable of performing sample preparation including adhesion promotion HMDS coating, resist spin-coating, sample baking and automated wet chemical development with minimum manual handling, via user-defined recipes. The system must be capable of handling several of our most sensitive and commonly used resists. A key attribute of the system will be the ability to form uniform and repeatable resist coating results and highly controlled development times of wafers post-exposure. The tool must also contain several hotplates so that different temperatures can be programed simultaneously, and samples are transferred to these without user intervention via robotic arms.
Doc Title: Laboratory, optical and precision equipments (excl. glasses)
Contract Type: Supplies - Documents:
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CLICK HERE TO LOGINAutomated Resist Processing System - Sweden Tender
The LUNDS UNIVERSITET, a Government sector organization in Sweden, has announced a new tender for Automated Resist Processing System. This tender is published on SwedenTenders under SET Ref No: 73101272 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2022-11-11.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
